Gas purifier

The gas purifier, also known as the purifier, is used to purify the gas in the process. Purifiers are used to reduce or eliminate impurities in gases, such as nitrogen, oxygen, methane, hydrogen and carbon dioxide. The gas purifier can remove moisture, hydrocarbons and other impurities. They are purified by catalysis or adsorption. Some types of purifiers are consumables (must be replaced when saturated), and some can be regenerated (can be reactivated).

Purification Technology of Gas Purifier

Purification technology includes chemical reaction, physical adsorption, chemical adsorption and so on. The commonly used processes include catalytic reaction, molecular sieve adsorption, ultra-low temperature adsorption, metal getter adsorption, palladium alloy membrane diffusion purification and so on, including PSA,TPSA and so on. What kind of purification method and which process are used mainly depends on the impurities to be separated and the impurity content requirements after purification.

Application Field of Gas Purifier

Gas purifier is mainly used in 1 semiconductor, LED/ laser, solar photovoltaic industry: N2, H2, Ar, NH3 and other gases needed in device preparation process, such as epitaxy, diffusion, MOCVD, ion implantation, plasma dry etching, lithography, annealing, lapping, sintering and so on. 2 Optical fiber industry: to protect nitrogen, Terminal purification of helium 3 gas industry: purification of gas source gas 4 cold rolling industry: purification of protective nitrogen 5 chemical industry: O 2 and H 2O purification of nitrogen, hydrogen and gas / liquid hydrocarbons.